X-ray Photoelectron Spectroscopy (XPS)
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K-Alpha
Features
● X-ray source : Al- Kα micro focused monochromator with variable spot size (50-400)µm
● Analyzer : 180 double focusing hemispherical analyzer with 128 channel detector
● Ion Gun : Energy range 100-4000 eV
● Sample Size : 4-axis sample stage, 60 x 60 mm sample area, 20 mm maximum sample thickness
● Charge Compensation : Dual beam source
Useful for
● Elemental composition of surface and quantification of there relative concentrations with some limitations
● Chemical states of elements
● Sputter depth profiling
● High resolution chemical state spectroscopy
Contact
Prof. Sudhansu Sharma (ssharma@iitgn.ac.in
