Wafer Probe Station
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Probe Station-Summit 11K (FormFactor)
Device Parameter Analyzer-B1500A Keysight and B1505 (Keysight)
Features
● 200mm ThermoChuck (electrically shielded)
● Moisture-free, light-tight and EMI-shielded test environment with MicroChamber® technology
● Patented AttoGuard® and PureLine® technologies for low leakage and low-capacitance measurements
● Optical Microscope with Zooming Capability
● Locking roll-out stage
● Easy on wafer navigation
● Temperature Range: -60'C to 300'C
● High Resolution, Medium Power and High Power SMUs
● LCR Meter, B1530A Waveform Generator
Useful for
● Current - Voltage, Capacitance - Voltage Measurement
● Semiconductor Device Electrical Characterization
● Reliability Measurement
● Failure Analysis
Contact
Dr. Nihar Ranjan Mohapatra (nihar@iitgn.ac.in)
